Sensors have long penetrated into extremely broad fields such as industrial production,

space development, ocean exploration, environmental protection, resource investigation,

medical diagnosis, bioengineering, and even cultural relics protection. It is no exaggeration

to say that from the vast space, to the vast ocean, and even a variety of complex engineering

systems, almost every modernization project is inseparable from a variety of sensors.

        It can be seen that the important role of sensor technology in developing the economy

and promoting social progress is very obvious. All countries in the world attach great importance

to the development of this field. It is believed that in the near future, sensor technology will

take a leap forward and reach a new level commensurate with its important position.

        The characteristics of the sensor include: miniaturization, digitalization, intelligence,

multi-function, systematization, networking, it not only promotes the transformation and

upgrading of traditional industries, but also may establish new industries, thus becoming

a new economic growth point in the 21st century. Miniaturization is based on

microelectromechanical system (MEMS) technology, which has been successfully applied

to silicon devices to make silicon pressure sensors.